s d regions

中文翻译源漏区

同义词释义

1)s d regions,源漏区

2)source/drain extension region,源/漏扩展区

3)source and drain extension,源漏扩展区

4)S/D extension,源漏延伸区

5)Measure Methodology,源/漏区刻蚀

6)leakage air sources,漏风源

Polysilicon doped heavily is introduced as solid phase diffusion source to realize ultra shallow source and drain extensions.

1μm栅线条 ,重掺杂多晶硅做固相扩散源实现 CMOS晶体管超浅源漏扩展区 ,并且将二者有机结合起来 ,成功实现了栅长约为 84 。